Self-Formed Diffusion Layer in Cu(Re) Alloy Film for Barrierless Copper Metallization
2022CoatingsJournalOpen access
10.3390/coatings12050613Full text6 citations
2022CoatingsJournalOpen access
10.3390/coatings12050613Full text6 citations
12 authors across 3 institutions in 2 countries.
Assignment is probabilistic — a work belongs to several fields in proportions.
Several sources describing one work is the point — it means the record rests on more than one authority.
2022 · Coatings · 6 citations
https://openalex.org/W4229077690